Method and structure for forming an integrated spatial light...

Details Method and structure for forming an integrated spatial light... Method and structure for forming an integrated spatial light...

2007-02-06

2007-02-06

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C257S432000, C359S315000

Reexamination Certificate

active

11028946

ABSTRACT:
A method of fabricating an integrated spatial light modulator. The method includes providing a first substrate including a bonding surface, processing a device substrate to form at least an electrode layer, the electrode layer including a plurality of electrodes, and depositing a standoff layer on the electrode layer. The method further includes forming standoff structures from the standoff layer and joining the bonding surface of the first substrate to the standoff structures on the device substrate. In a particular embodiment, the method further includes, after the step of depositing a standoff layer, performing chemical mechanical polishing of the standoff layer to planarize an upper surface of the standoff layer.

REFERENCES:
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4317611 (1982-03-01), Petersen
patent: 4566935 (1986-01-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5170283 (1992-12-01), O'Brien et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5382961 (1995-01-01), Gale, Jr.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5489952 (1996-02-01), Gove et al.
patent: 5504614 (1996-04-01), Webb et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5600383 (1997-02-01), Hornbeck
patent: 5661591 (1997-08-01), Lin et al.
patent: 5663749 (1997-09-01), Fams et al.
patent: 5742419 (1998-04-01), Dickensheets et al.
patent: 5757536 (1998-05-01), Rioco et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6038056 (2000-03-01), Florence et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6049317 (2000-04-01), Thompson et al.
patent: 6172797 (2001-01-01), Huibers
patent: 6201521 (2001-03-01), Doherty
patent: 6252277 (2001-06-01), Chan et al.
patent: 6323982 (2001-11-01), Hornbeck
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6388661 (2002-05-01), Richards
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6429033 (2002-08-01), Gee et al.
patent: 6489241 (2002-12-01), Thilderkvist et al.
patent: 6529310 (2003-03-01), Huibers et al.
patent: 6538800 (2003-03-01), Huibers
patent: 6542653 (2003-04-01), Wu et al.
patent: 6543286 (2003-04-01), Garverick et al.
patent: 6642913 (2003-11-01), Kimura et al.
patent: 6809852 (2004-10-01), Tao et al.
patent: 2002/0024483 (2002-02-01), Makino
patent: 2002/0041455 (2002-04-01), Sawada et al.
patent: 2002/0071166 (2002-06-01), Jin et al.
patent: 2002/0071169 (2002-06-01), Bowers et al.
patent: 2002/0132389 (2002-09-01), Patel et al.
patent: 2003/0030118 (2003-02-01), Kim
patent: 2003/0117686 (2003-06-01), DiCarlo
patent: 2004/0004753 (2004-01-01), Pan
patent: 2004/0008402 (2004-01-01), Patel et al.
patent: 2004/0125347 (2004-07-01), Patel et al.
patent: 2004/0136044 (2004-07-01), Miller et al.
patent: 2004/0184133 (2004-09-01), Su et al.
patent: 2004/0190817 (2004-09-01), Aubuchon
patent: 2004/0214350 (2004-10-01), Pan et al.
patent: 2005/0041277 (2005-02-01), Huibers
patent: 2005/0052725 (2005-03-01), Niklaus et al.
patent: 2005/0157370 (2005-07-01), Chen
patent: 1237032 (2002-09-01), None
patent: WO 03/068669 (2003-08-01), None
Henley et al., “A New SOI Manufacturing Technology Using Atomic layer Cleaving,” Silicon Genesis Corporation Campbell CA. pp. 1-5.
Petersen, K.E., Micromechanical Light Modulator Array Fabricated On Silicon. Applied Physics Letters. Oct. 15, 1977, pp. 521-523, vol. 31 No. 8.
Petersen, K.E., Micromechanical Membrane Switches On Silicon. IBM J. Res. Develop., Jul. 1979, pp. 376-385. vol. 23, No. 4.

Affiliated with

Also associated with

Rating

Method and structure for forming an integrated spatial light... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and structure for forming an integrated spatial light..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and structure for forming an integrated spatial light... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3842191