Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Corporate Assignee
active
No affiliations
Anti-stiction gas-phase lubricant for micromechanical systems
Apparatus for micro-electro mechanical system package
Architecture of a reflective spatial light modulator
Batch process and device for forming spacer structures for...
Bond method and structure using selective application of...
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