Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2008-02-15
2009-12-22
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S310000, C250S305000, C250S492200, C250S492300
Reexamination Certificate
active
07635842
ABSTRACT:
A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment.
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Friedman Stuart
Nasser-Ghodsi Mehran
Toth Gabor
Yu Ming Lun
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
Wells Nikita
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