Method and device to discharge samples of insulating material du

Details Method and device to discharge samples of insulating material du Method and device to discharge samples of insulating material du

1987-07-14

1988-05-31

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250282, G01N 2322

Patent

active

047483253

ABSTRACT:
To compensate for the charges created during the bombardment of a sample of insulating material, positively polarized by a beam of positive, primary ions, the method uses the secondary electrons emitted by the acceleration electrode under the impact of particles, emitted by the sample, which have not passed through the hole provided in this electrode for analysis. For this, an additional electrode, having a hole of a diameter greater than that of the acceleration electrode and carried to a potential which is greater than that of the same electrode by about 100 volts, is placed between the sample and this electrode, near the latter, to focus the secondary electrons on the imaged field of the sample.

REFERENCES:
Patent Abstracts of Japan, vol. 9, #274-10/31/85, Shimazu Seisakusho, K. K-Ion Apparatus Device.
Patent Abstracts of Japan, vol. 7, #162, 7/15/83, Fujitsu, K. K-Ion Implementation Device.
Patent Abstracts of Japan; vol. 7, #243, 10/28/83, Fujitsu, K. K-Irradiation of Energy Rays.

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