Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1999-02-12
2000-10-17
Diamond, Alan
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20429802, 20429815, 20429826, 20429827, 20429828, 20429823, 2041921, 20419215, 20419223, 118715, 118720, 118728, 118729, 118723VE, 118723R, 118730, 118731, 4272555, 427569, 427574, 427578, 427481, 427471, C23C 1422, C23C 1456, C23C 1434, B65G 4900
Patent
active
061325627
ABSTRACT:
For coating substrates (17,18,20,21,22) in a vacuum-coating chamber (2) the substrates are introduced by an air lock into the coating chamber (2) and moved along a transport path in front of the coating sources (50a,b,c,d) producing a coating cloud. To this end, the substrates (17,18,20,21,22) are led past the coating sources (50a,b,c,d) by means of holding devices (24) arranged movably on a transport belt (9) during at least two successive coating phases. During the one coating phase, the substrates (17,18,20,21,22) are oriented along one transport direction T.sub.3 oriented towards the coating sources (50a,b,c,d) such that essentially the substrate bottom of the cylindrical substrate is coated. During the subsequent second coating phase, the substrates are oriented in front of the coating sources (50a,b,c,d) in a direction T.sub.4 opposite the transport direction T.sub.3, wherein the substrates (17,18,20,21,22) are oriented such that essentially the cylindrical side surface is coated. By this method, the substrates (17,18,20,21,22) are coated successively in an identical manner and independently of possible substrate positions with relation to the coating sources (50a,b,c,d) during the coating process. Bottle-shaped containers, in particular, plastic bottles are vapor-coated with a gas- or fluid-barrier layer using the method. The coating sources (50a,b,c,d) include thermal vaporizers and/or plasma cathode sputter sources.
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Baumecker Tomas
Grimm Helmut
Henrich Jurgen
Michael Klaus
Rodling Gert
Diamond Alan
Leybold Systems GmbH
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