Method and device for the formation of holes in a layer of photo

Details Method and device for the formation of holes in a layer of photo Method and device for the formation of holes in a layer of photo

1996-08-14

1999-03-16

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430396, 430330, G03F 700

Patent

active

058828451

ABSTRACT:
A method and a device for the formation of holes in a layer of photosensitive material, in particular for the manufacture of electron sources.
This method is characterized in that a membrane (121) with micro-perforations (122) is laid onto the layer of photosensitive material (120); the layer of photosensitive material is insolated through the membrane (121) in order to print areas (125) corresponding to the micro-perforations (122); the membrane (121) is separated from the layer of photosensitive material (120) thus insolated and the photosensitive layer (120) is then developed in order to form holes in it corresponding to the insolated areas (125).

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