Method and device for contact-free interval or thickness measure

Details Method and device for contact-free interval or thickness measure Method and device for contact-free interval or thickness measure

1980-02-05

1981-05-12

Rosenberger, R. A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356 1, G01S 962

Patent

active

042668751

ABSTRACT:
A method and apparatus is disclosed for contact-free interval or thickness measurement. A sharply concentrated light beam is periodically deflected over a measuring space having a measuring plane and reference plane situated therein. A beam divider is positioned after the beam deflector and deflects the beam towards first, second and third light detectors. A fourth light detector is also provided to receive reflected light from the measuring plane and reference plane. A first time difference is utilized to control deflection frequency of the light beam; a second time difference controls deflection amplitude of the light beam; a third time difference determines a spacing of the measuring plane from the reference plane; and a fourth time difference corrects for changes in a direction of the light beam such as when a new light source is positioned in the system or when other directional errors occur.

REFERENCES:
patent: 3923395 (1975-12-01), Bodlaj
patent: 4053227 (1977-10-01), Bodlaj
Bodlaj, V. Siemens Forschungs-und Entwicklungsbericht 1975, No. 6, pp. 336-344.
Bodlaj, V. "Lambda, a Laser Measuring System for the Differential Determination of Thickness", Siemens Forschungs-und Entwicklungsbericht, 1977, No. 3, pp. 180-188.

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