Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With programmed – cyclic – or time responsive control
Reexamination Certificate
2007-01-09
2007-01-09
King, Roy (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
With programmed, cyclic, or time responsive control
C205S662000, C205S682000
Reexamination Certificate
active
10608404
ABSTRACT:
Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a method is provided for processing a substrate to remove conductive material disposed over narrow feature definitions formed in a substrate at a higher removal rate than conductive material disposed over wide feature definitions formed in a substrate by an electrochemical mechanical polishing technique. The electrochemical mechanical polishing technique may include a polishing composition comprising an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 2 and about 10, and a solvent.
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patent: 58-093886 (19
Butterfield Paul D.
Chen Liang-Yuh
Duboust Alain
Hu Yongqi
Liu Feng Q.
Alexander Michael P.
Applied Materials Inc.
King Roy
Patterson and Sheridan
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