Method and arrangement for testing and repairing an integrated c

Details Method and arrangement for testing and repairing an integrated c Method and arrangement for testing and repairing an integrated c

1991-08-14

1993-05-25

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250310, 25049221, H01J 3726, H01J 37302

Patent

active

052142841

ABSTRACT:
The invention relates to an arrangement for testing and repairing an inteted circuit in which the ion beam used for the repair simultaneously forms the corpuscular beam used for the test operation and one single beam generator is provided in order to generate this beam. Testing and repairing in one arrangement, without it being necessary to transfer the integrated circuit to be examined, reduces the expenditure in terms of time and cost.

REFERENCES:
patent: 4683376 (1987-07-01), Feuerbaum et al.
patent: 4812651 (1989-03-01), Feuerbaum
patent: 4827127 (1989-05-01), Todokoro
patent: 4908226 (1990-03-01), Kubena et al.
patent: 4983830 (1991-01-01), Iwasaki
patent: 5061856 (1991-10-01), Frosien et al.
patent: 5083033 (1992-01-01), Komane et al.

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