Method and apparatus for verifying proper substrate positioning

Details Method and apparatus for verifying proper substrate positioning Method and apparatus for verifying proper substrate positioning

2011-04-26

2011-04-26

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Photometers

C356S614000

Reexamination Certificate

active

07933009

ABSTRACT:
Embodiments of methods and apparatus for detecting the proper position of a substrate in a chamber are provided herein. In some embodiments, a substrate position detection apparatus includes a substrate support having a plurality of lift pins for supporting a substrate in an elevated position thereover; a light source for directing a beam of light upon a reflective upper surface of the substrate; and a light sensor for detecting a reflected beam of light from the upper surface of the substrate upon the substrate being aligned in a predetermined elevated position.

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International Search Report and Written Opinion mailed Oct. 6, 2008 for PCT Application No. PCT/US08/70486.

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