Conveyors: fluid current – With means to control conveying fluid or movement of load in... – Control of conveying fluid
Reexamination Certificate
2005-06-15
2008-08-26
Hess, Douglas A (Department: 3651)
Conveyors: fluid current
With means to control conveying fluid or movement of load in...
Control of conveying fluid
C406S026000, C406S146000
Reexamination Certificate
active
07416370
ABSTRACT:
A method for transporting a substrate is provided. In this method, a non-Newtonian fluid is provided and the substrate is suspended in the non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the substrate. Thereafter, a supply force is applied on the non-Newtonian fluid to cause the non-Newtonian fluid to flow, whereby the flow is capable of moving the substrate along a direction of the flow. Apparatuses and systems for transporting the substrate using the non-Newtonian fluid also are described.
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de Larios John M.
Korolik Mikhail
Parks John
Ravkin Mike
Redeker Fred C.
Hess Douglas A
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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