Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1989-02-02
1991-01-01
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250305, 250306, 250288, H01J 37252
Patent
active
049820907
ABSTRACT:
A method and an apparatus for the quantitative depth analysis of a solid sample by backscatter analyzing the sample with the light ions, removing a thin layer of the sample by sputter etching, using a beam of medium-mass or high-mass ions to bombard the sample, backscatter analyzing the sputter etched sample, and repeatedly performing the steps of removing a thin layer of the sample and backscatter analyzing the sputter etched sample. An apparatus for performing the method includes an analysis chamber for retaining the sample to be analyzed, and first and second accelerators. The first accelerator generates fast, light ions with an energy from about 0.1 MeV to about 5.0 MeV to be directed into the chamber onto a predetermined region of the sample at a first desired predetermined bombardment angle so that the fast ions are scattered by the ions of the sample. The second accelerator accelerates a beam of slow medium-mass or high-mass ions with an energy from about 0.5 to about 10.0 keV to be directed onto the predetermined region of the sample at a second desired predetermined bombardment angle. The analysis chamber has a sample manipulator for manipulating the sample and an analyzer for determining the energy of the fast ion scattered by the atoms of the sample.
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Berman Jack I.
Gesellschaft fur Strahlen- und Umweltforschung mbH (GSF)
Nguyen Kiet T.
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