Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate
2006-02-28
2006-02-28
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
C250S306000, C250S307000, C250S310000, C250S492100, C250S492300
Reexamination Certificate
active
07005640
ABSTRACT:
The present invention provides a method for the characterization of a depth structure in a substrate at a surface of the substrate, in which a cutout is produced at the surface of the substrate between an imaging device and the depth structure, the cutout being spaced apart from the depth structure. A layer of the substrate, which incipiently cuts the depth structure and the cutout, is removed by means of an ion beam in order to obtain a cut area, the layer and the normal to the area of the surface of the substrate assuming an acute angle that is greater than zero. The cut area is imaged by means of the imaging device in order to characterize the depth structure.
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Jeremy D. Russell et al. (2003) “A Method for Exact Determination of DRAM Deep Trench Surface Area,” Proceedings from the 29thInternational Symposium for Testing and Failure Analysis, Nov. 2003, pp. 140-143.
German Examination Report dated Aug. 25, 2004.
Infineon - Technologies AG
Morrison & Foerster / LLP
Souw Bernard E.
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