Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-06-27
2006-06-27
Bell, Bruce F. (Department: 1746)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297010, C204S297070, C204S297080, C204S297090, C204S297100, C204S286100, C204S287000
Reexamination Certificate
active
07067045
ABSTRACT:
An apparatus for securing a substrate in an electrochemical deposition system is provided. The apparatus generally includes a substrate support member adapted to receive the substrate and a thrust plate assembly adapted to exert a downward force on the substrate. For some embodiments, a first sealing member adapted to engage a plating surface of the substrate may be attached to the substrate support member. The apparatus may also include a second sealing member adapted to engage a non-plating surface of the substrate or a surface of the substrate support member to prevent the flow of plating fluid to a non-plating surface of the substrate. The apparatus may also include electrical contacts to electrically contact the plating or non-plating surface of the substrate.
REFERENCES:
patent: 6251236 (2001-06-01), Stevens
patent: 6322678 (2001-11-01), Woodruff et al.
patent: 6423636 (2002-07-01), Dordi et al.
patent: 6527926 (2003-03-01), Woodruff et al.
patent: 6589401 (2003-07-01), Patton et al.
Burkhart Vincent E.
Herchen Harald
Keigler Arthur
Trinh Son N.
Applied Materials Inc.
Bell Bruce F.
Patterson & Sheridan LLP
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