Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2008-09-16
2008-09-16
Vanore, David A. (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C261S004000, C261S004000
Reexamination Certificate
active
11414649
ABSTRACT:
Embodiments in accordance with the present invention relate to a number of techniques, which may be applied alone or in combination, to reduce charge damage of substrates exposed to electron beam radiation. In one embodiment, charge damage is reduced by establishing a robust electrical connection between the exposed substrate and ground. In another embodiment, charge damage is reduced by modifying the sequence of steps for activating and deactivating the electron beam source to reduce the accumulation of charge on the substrate. In still another embodiment, a plasma is struck in the chamber containing the e-beam treated substrate, thereby removing accumulated charge from the substrate. In a further embodiment of the present invention, the voltage of the anode of the e-beam source is reduced in magnitude to account for differences in electron conversion efficiency exhibited by different cathode materials.
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Cho Tom K.
Demos Alexandros T.
Dixit Girish A.
Elsheref Khaled A.
M'Saad Hichem
Applied Materials Inc.
Townsend and Townsend and Crew
Vanore David A.
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