Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2007-05-01
2007-05-01
Rose, Robert A. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S443000, C451S456000
Reexamination Certificate
active
11209167
ABSTRACT:
Embodiments of a conditioning head for in-situ conditioning and/or cleaning a processing pad of a CMP, ECMP, or other processing system are provided. In one embodiment, the conditioning head includes a brush disposed in a central cavity. A cleaning fluid is provided through the central cavity of the conditioning head to a processing pad. The brush spins and moves laterally across the surface of the processing pad. The cleaning solution dispensed through the conditioning head dissolves by-products of the processing operation while the brush gently wipes the processing pad. A lip of the conditioning head retains the cleaning fluid and cleaning waste, thereby minimizing contamination of the area outside of the conditioning head. The cleaning waste is removed from the processing pad via passages formed near the outer periphery of the conditioning head.
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U.S. Appl. No. 09/469,709, filed Dec. 21, 1999.
Chen Liang-Yuh
Hu Yongqi
Jia Renhe
Liu Feng Q.
Mao Daxin
Applied Materials Inc.
Patterson and Sheridan
Rose Robert A.
LandOfFree
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