Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1993-12-17
1995-02-21
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
156626, 356382, G01B 1106
Patent
active
053921240
ABSTRACT:
A method and apparatus for detecting an etching endpoint of a film on a substrate whereby a first excitation beam of light having a prescribed wavelength is provided, the first light beam substantially containing only a first harmonic component of light at that wavelength. The first light beam is directed at a prescribed incident angle to an interface between the film and the substrate, the first light beam being reflected off the interface to thereby provide a second light beam, the second light beam containing the first harmonic component of the first light beam and a generated second harmonic component. The generated second harmonic component is detected and a first output signal representative thereof is provided. A generated second harmonic component reference of the first light beam is produced and a second output signal representative of a generated second harmonic component reference is provided. The detected second harmonic component of the first light beam is normalized, as a function of the first and second output signals, in real-time, and a third output signal representative of an occurrence of a prescribed change in the normalized detected second harmonic component is provided. The prescribed change corresponds to the etching endpoint of the film on the substrate.
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Barbee Steven G.
Heinz Tony F.
Hofer Ulrich
Li Leping
Silvestri Victor J.
Balconi-Lamica Michael J.
Eisenberg Jason D.
International Business Machines - Corporation
Rosenberger Richard A.
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