Method and apparatus for processing pattern image data by SEM

Details Method and apparatus for processing pattern image data by SEM Method and apparatus for processing pattern image data by SEM

1995-01-27

1999-03-23

Kelley, Christopher S.

Image analysis

Histogram processing

For setting a threshold

382257, 382273, 382147, G06K 938

Patent

active

058870806

ABSTRACT:
Analog image data a SEM are converted into digital data, and are processed by a spatial filtering processing, histogram processing, threshold value setting, three-valued image data processing, noise reduction and the like. Area of a pattern in the three-valued image data is calculated by a labelling and calculation processing, and a pattern is sequentially detected by comparing the area of the pattern with a reference area value. The comparison and detection of the same or similar patterns repeated in the SEM image are performed by using the area of the pattern, and are not performed by a shape of the pattern, thereby resulting a precise detection at high speed by using a microprocessor. Since it is possible to perform a pattern recognition from the area value even though the pattern does not have a characteristic, it is possible to precisely detect and recognize a pattern image in high speed.

REFERENCES:
patent: 4847786 (1989-07-01), Wang et al.
patent: 4975972 (1990-12-01), Bose et al.
patent: 5265200 (1993-11-01), Edgar
patent: 5278921 (1994-01-01), Nakamura et al.
patent: 5345513 (1994-09-01), Takeda et al.
patent: 5438552 (1995-08-01), Audi et al.
patent: 5479535 (1995-12-01), Komatsu

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