Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-12-07
2009-10-13
Geisel, Kara E (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S445000
Reexamination Certificate
active
07602484
ABSTRACT:
A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
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PCT International Search Report, mail date Jul. 4, 2005, for PCT International Application No. PCT/US2004/043444.
Davis Matthew F.
Lian Lei
Netchitaliouk Andrei Ivanovich
Uo Yasuhiro
Willwerth Michael D.
Applied Materials Inc.
Geisel Kara E
Moser IP Law Group
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