Method and apparatus for pattern detection

Details Method and apparatus for pattern detection Method and apparatus for pattern detection

1993-02-02

1995-07-04

Limanek, Robert P.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

356357, 356350, 250548, G01N 2101, G01N 2115

Patent

active

054305489

ABSTRACT:
The inventive pattern detection method and apparatus produce, from an optical image of a pattern in attention and an optical image of a pattern which should be identical to the pattern in attention, an optical image by merging the images, with a relative phase shift being imposed, and pattern information is detected or observed in the merged optical image or a signal produced from the optical image through the conversion with an opto-electric transducer means.

REFERENCES:
patent: 3683679 (1972-09-01), Brenden et al.
patent: 3909602 (1975-09-01), Micka
patent: 4692690 (1987-09-01), Hara et al.
patent: 4777641 (1988-10-01), Inagaki et al.
patent: 4862008 (1989-09-01), Oshida et al.
patent: 4906852 (1990-03-01), Nakata et al.
patent: 4952058 (1990-08-01), Noguchi et al.
patent: 5028802 (1991-07-01), Webb et al.
patent: 5048967 (1991-09-01), Suzuki et al.
patent: 5075562 (1991-12-01), Greivenkamp, Jr. et al.
patent: 5098191 (1992-03-01), Noguchi et al.
patent: 5227862 (1993-07-01), Oshida et al.

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