Method and apparatus for optical probing of integrated...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure

Reexamination Certificate

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C257S088000

Reexamination Certificate

active

07049632

ABSTRACT:
Optical transducers disposed on an integrated circuit correspond to test points thereon. The state of optical transducers perceived by an optical sensor is correlated to test points. Alignment of the optical sensor relative to the optical transducers is accomplished electronically or mechanically.

REFERENCES:
patent: 4818896 (1989-04-01), Cavanna
patent: 4906922 (1990-03-01), Takahashi et al.
patent: 4922194 (1990-05-01), Gaussa et al.
patent: 5363088 (1994-11-01), Schweitzer, Jr.
patent: 6654331 (2003-11-01), Wilson et al.
patent: 2004/0117142 (2004-06-01), Pillai

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