Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Reexamination Certificate
2005-08-02
2005-08-02
Le, N. (Department: 2862)
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
C324S234000, C324S226000
Reexamination Certificate
active
06924641
ABSTRACT:
A sensor for monitoring a conductive film in a substrate during chemical mechanical polishing generates an alternating magnetic field that impinges a substrate and induces eddy currents. The sensor can have a core, a first coil wound around a first portion of the core and a second coil wound around a second portion of the core. The sensor can be positioned on a side of the polishing surface opposite the substrate. The sensor can detect a phase difference between a drive signal and a measured signal.
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Birang Manoocher
Hanawa Hiroji
Johansson Nils
Swedek Boguslaw
Applied Materials Inc.
Aurora Reenna
Fish & Richardson
Le N.
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