Structure having pores and its manufacturing method

Details Structure having pores and its manufacturing method Structure having pores and its manufacturing method

2005-07-05

2005-07-05

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C257S014000, C257S028000, C438S022000, C438S268000, C438S746000

Reexamination Certificate

active

06914008

ABSTRACT:
A structure having pores includes a first layer containing alumina, a second layer that includes at least one of Ti, Zr, Hf, Nb, Ta, Mo, W and Si, and a third layer with electrical conductivity, in this order, wherein the first and second layers have pores.

REFERENCES:
patent: 4091158 (1978-05-01), Kasuga et al.
patent: 4109287 (1978-08-01), Kawai et al.
patent: 5523386 (1996-06-01), Le-Khac
patent: 5850329 (1998-12-01), Sullivan
patent: 5923511 (1999-07-01), Bandara et al.
patent: 6139713 (2000-10-01), Masuda et al.
patent: 6214738 (2001-04-01), Aiba et al.
patent: 6359288 (2002-03-01), Ying et al.
patent: 6464853 (2002-10-01), Iwasaki et al.
patent: 6541386 (2003-04-01), Aibe et al.
patent: 6628053 (2003-09-01), Den et al.
patent: 6709929 (2004-03-01), Zhang et al.
patent: 2002/0014621 (2002-02-01), Den et al.
patent: 2002/0086185 (2002-07-01), Yasui et al.
patent: 2003/0001150 (2003-01-01), Iwasaki et al.
patent: 2003/0197456 (2003-10-01), Den et al.
patent: 58-188334 (1983-11-01), None
patent: 62-114121 (1987-05-01), None
patent: 11-224422 (1999-08-01), None
Masuda, H., Solid State Physics, vol. 31, No. 5, 493-499 (1996).
Furneaux, et al., “The Formation of controlled-porosity . . . aluminum”, Nature, vol. 337, No. 6203, 147-149 (1989).

Affiliated with

Also associated with

Rating

Structure having pores and its manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Structure having pores and its manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Structure having pores and its manufacturing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3402301