Method and apparatus for measuring the dimensions of an object

Details Method and apparatus for measuring the dimensions of an object Method and apparatus for measuring the dimensions of an object

1993-04-06

1995-01-17

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

250560, G01B 1108

Patent

active

053830229

ABSTRACT:
Laser beams from separate sources are deflected by a rotating mirror and travel over further mirrors and objective lenses into a measuring field for measuring the dimensions of an object 3 in the x and y directions. The result is a simple, compact configuration. The separate optical systems for both measuring directions can be set in an optimum manner independently of one another, permitting great precision. Thanks to an offset of the optical axis of the incident laser beams relative to the rotation axis of the mirror the measurements in the two directions are made staggered in time so that the measurement signals can be processed in a common measuring channel.

REFERENCES:
patent: 3870890 (1975-03-01), Binks et al.
patent: 4432648 (1984-02-01), Musto et al.
patent: 4444457 (1984-04-01), Studer
patent: 4880991 (1989-11-01), Boehnlein et al.
patent: 5212539 (1993-05-01), Wogerbauer

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