Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Reexamination Certificate
2000-06-08
2001-08-28
Font, Frank G. (Department: 2877)
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
C356S329000, C356S370000, C356S237500, C250S372000, C250S341300
Reexamination Certificate
active
06281974
ABSTRACT:
FIELD OF THE INVENTION
This invention is in the field of measurement of techniques and relates to a method and a system for measuring the parameters of patterned structures.
BACKGROUND OF THE INVENTION
Techniques for thickness measurements of patterned structures have been developed. The term “patterned structure” used herein, signifies a structure formed with regions having different optical properties with_respect to an incident radiation. More particularly, a patterned structure represents a grid having one or more cycles, each cycle being formed of at least two different optical properties
Production of integrated circuits on semiconductor wafers requires maintaining tight control over the dimensions of small structures. Certain measuring techniques enable the local dimensions of a wafer to be measured with relatively high resolution, but at the expense of discontinued use of the wafer in production. For example, inspection using a scanning electron microscope gives measurements of the parameters of a patterned structure, but at the expense of cleaving it and thus excluding it from continued processing. Mass production of patterned structures such as wafers requires a non-destructive process for controlling thin film parameters in a manner enabling the local measurements to be performed.
One kind of the conventional techniques for measuring thickness of thin films is disclosed in U.S. Pat. No. 4,999,014. The technique is based on the use of small spot size and large numerical aperture for measurements on small areas. Unfortunately, in the case of a very small structure, this approach suffers from a common drawback associated, on the one hand, with the use of a small spot-size and, on the other hand, owing to the large numerical aperture, with the collection of high diffraction orders. The term “small spot-size” signifies the spot diameter similar in size to the line or space width of the measured structure, i.e. a single grid cycle. This leads to various problems, which are difficult to solve. Indeed, not all the stacks' layers are in the focus of an optical system used for collecting reflected light, the optical system being bulky and complicated. Detected signals are sensitive to small details of a grid profile and to small deviations in the spot placement. Diffraction effects, which depend significantly on the grid profile and topography and therefore are difficult to model, have to be included in calculations.
Another example of the conventional techniques of the kind specified is disclosed in U.S. Pat. No. 5,361,137 and relates to a method and an apparatus for measuring the submicron linewidths of a patterned structure. The measurements are performed on a so-called “test pattern” in the form of a diffraction grating, which is placed in a test area of the wafer. Here, as in most conventional systems, a monochromatic incident light is employed and diffraction patterns are produced and analyzed. However, a large number of test areas are used and also information on multiple parameters cannot be obtained.
According to some conventional techniques, for example that disclosed in U.S. Pat. No. 5,087,121, portions with and without trenches are separately illuminated with broadband light, the reflection spectrum is measured and corresponding results are compared to each other with the result being the height or depth of a structure. However, it is often the case that the structure under inspection is such that the different portions cannot be separately imaged. This is owing to an unavoidable limitation associated with the diameter of a beam of incident radiation striking the structure.
The above approach utilized frequency filtering to enable separation of interference signals from different layers. This is not feasible for layers of small thickness and small thickness of difference because of a limited number of reflection oscillations.
Yet another example of the conventional technique for implementing depth measurements is disclosed in U.S. Pat. No. 5,702,956. The method is based on the use of a test site that represents a patterned structure similar to that of the wafer (circuit site), but taken in an enlarged scale. The test site is in the form of a plurality of test areas each located in the space between two locally adjacent circuit areas. The test areas are designed so as to be large enough to have a trench depth measured by an in-line measuring tool. The measurements are performed by comparing the parameters of different test areas assuming that the process is independent of feature size. For many processes in the field such as etching and photoresist development, this assumption is incorrect and this method is therefor inapplicable.
SUMMARY OF THE INVENTION
It is a major object of the present invention to overcome the above listed and other disadvantages of the conventional techniques and provide a novel method and system for non-destructive, non-contact measurements of the parameters of patterned structures.
It is a further object of the invention to provide such a method and system that enables the relatively small amount of information representative of the structure's conditions to be obtained and successfully processed for carrying out the measurements, even of very complicated structures.
According to one aspect of the present invention, there is provided a method for measuring at least one desired parameter of a patterned structure which comprises a grid having at least one cycle formed of at least two locally adjacent stacks having different optical properties in respect of an incident radiation, the structure having a plurality of features defined by a certain process of its manufacturing, the method comprising the steps of:
(a) providing an optical model based on at least some of said features of the structure and capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure.
(b) illuminating a measurement area by an incident radiation of a preset substantially wide wavelength range, the measurement area being substantially larger than a surface area of the structure defined by the grid cycle;
(c) detecting light reflected from the illuminated part substantially at zero-order and obtaining measured data representative of photometric intensities of each wavelength within said wavelength range;
(d) analyzing the measured and theoretical data for optimizing said optical model until the theoretical data satisfies a predetermined condition; and
(e) upon detecting that the predetermined condition is satisfied, calculating said at least one parameter of the structure.
Thus the main idea of the present invention consists of the following. A patterned structure, whose parameters are to be measured, is manufactured by several sequential steps of a certain technological process completed prior to the measurements. Actual design-rule features can often be found in the structure in sets (e.g. read lines in memories). The term “design-rule features” signifies a predetermined set of the allowed pattern dimensions used throughout the wafer. Hence, information regarding the desired parameters can be obtained using super-micron tools such as a large spot focused on a set of lines.
The present invention, as distinct from the conventional approach, utilizes a spectrophotometer that receives reflected light substantially from zero-order. The zero-order signal is not sensitive to small details of the grid profile of the structure such as edge rounding or local slopes. This enables the effects associated with diffracted light not be considered, and thereby the optical model, as well as the optical system, to be simplified. Moreover, the large spot-size enables large depth of focus that includes the whole depth of the structure to be measured. When the spot includes a number of grid cycles, then the measurement is insensitive to local defects, exact spot placement or focusing.
In the case of wafe
Finarov Moshe
Scheiner David
Font Frank G.
Greer Burns & Crain Ltd.
Nova Measuring Instruments Ltd.
Punnoose Roy M.
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