Method and apparatus for loading a wafer into a test machine

Details Method and apparatus for loading a wafer into a test machine Method and apparatus for loading a wafer into a test machine

1997-11-17

2000-08-15

Karlsen, Ernest

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

414590, G01R 3102, B66F 918

Patent

active

06104184&

ABSTRACT:
The present invention discloses a removable wafer mounting tray for positioning a wafer in a microscope by utilizing a tray body that is generally constructed in a disk shape and has a recess in its top surface for receiving a wafer to be tested. The wafer mounting tray further includes a handle that extends outwardly from the tray adapted for gripping by a machine arm or by a human hand for placement of the wafer mounting tray into a test machine. The novel wafer mounting tray shelters and protects a wafer during transit to and from a test machine such that wafer breakage or scratching problems can be substantially reduced.

REFERENCES:
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4901011 (1990-02-01), Koike et al.
patent: 5479108 (1995-12-01), Cheng
patent: 5604443 (1997-02-01), Kitamura et al.

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