Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate
2006-11-21
2009-10-13
Ahmed, Shamim (Department: 1792)
Etching a substrate: processes
Gas phase etching of substrate
With measuring, testing, or inspecting
C216S060000, C216S067000
Reexamination Certificate
active
07601272
ABSTRACT:
An apparatus for integrating metrology and etch processing is disclosed. The apparatus comprises a multi-chamber system having a transfer chamber, an etch chamber and a metrology chamber, and a robot configured to transfer a substrate between the etch chamber and the metrology chamber. A method of processing a substrate and performing metrology measurement using this apparatus is also disclosed.
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Lewington Richard
Nguyen Khiem K.
Ahmed Shamim
Applied Materials Inc.
Patterson & Sheridan LLP
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