Method and apparatus for insulating material using trenches

Details Method and apparatus for insulating material using trenches Method and apparatus for insulating material using trenches

1998-03-23

1999-11-02

Whitehead, Jr., Carl

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257501, 257506, H01L 2900

Patent

active

059776099

ABSTRACT:
An island of material has an insulating trench structure. The trench structure includes a first insulating trench surrounded by a second insulating trench. The trenches are joined together by at least two transverse linking trenches.

REFERENCES:
patent: 5148247 (1992-09-01), Miura et al.
patent: 5561073 (1996-10-01), Jerome et al.
patent: 5614750 (1997-03-01), Ellul et al.
patent: 5661329 (1997-08-01), Hiramoto et al.
Wolf, S., "Silicon Processing for the VLSI Era--vol. II", 1990, Lattise Press USA, pp. 45-56, Fig. 2.34 & 2.35.

Affiliated with

Also associated with

Rating

Method and apparatus for insulating material using trenches does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for insulating material using trenches, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for insulating material using trenches will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2139092