Metallurgical apparatus – With control means responsive to sensed condition – With means supplying a treating agent
Reexamination Certificate
2005-08-16
2005-08-16
Kastler, Scott (Department: 1742)
Metallurgical apparatus
With control means responsive to sensed condition
With means supplying a treating agent
C034S412000, C034S418000
Reexamination Certificate
active
06929774
ABSTRACT:
A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted to cool a substrate positioned proximate the cooling mechanism, and a transfer mechanism adapted to transfer a substrate between the position proximate the heating mechanism and the position proximate the cooling mechanism.
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