Method and apparatus for handling charged particle beam

Details Method and apparatus for handling charged particle beam Method and apparatus for handling charged particle beam

1983-07-18

1985-11-19

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01N 2300

Patent

active

045544522

ABSTRACT:
In a method of and an apparatus for handling a charged particle beam, at least one of a signal representative of the astigmatism and a signal for correction of the astigmatism is obtained by computation on the basis of values detected under a certain condition from signal particles derived from an object which is moved repeatedly at least two directions with respect to a charged particle beam. The amount and direction of astigmatism thus computed are displayed respectively for manual correction. Astigmatism correction and focusing can be also carried out automatically.

REFERENCES:
patent: 3748467 (1973-07-01), Suganuma
patent: 3937959 (1976-02-01), Namae
patent: 4214163 (1980-07-01), Namae et al.

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