4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Elionix Inc.

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Electron beam lithography system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Method and apparatus for handling charged particle beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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