Method and apparatus for fast automated failure...

Details Method and apparatus for fast automated failure... Method and apparatus for fast automated failure...

2005-11-08

2005-11-08

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

Reexamination Certificate

active

06963813

ABSTRACT:
A method for classifying patterns of failcodes on a semiconductor wafer, in accordance with the present invention, includes determining failcodes for chips on the wafer and checking adjacent chips for each chip on the wafer having a failcode to determine a failcode pattern having a defined number of chips.

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