Method and apparatus for extracting well-formed, high current io

Details Method and apparatus for extracting well-formed, high current io Method and apparatus for extracting well-formed, high current io

1974-11-11

1976-05-04

Church, Craig E.

Radiant energy

Ion generation

Field ionization type

3151113, H01J 724, H01J 3708

Patent

active

039550915

ABSTRACT:
A well-formed ion beam having a high current is extracted from an ion plasma by a low perveance ion extraction system including focus and extraction electrodes, the extraction electrode having an ion exit aperture and being axially spaced from the focus electrode a distance of at least several times the diameter of the ion exit aperture. A voltage differential is applied between the electrodes to define a plasma sheath at the ion source aperture, and the ion beam is extracted from the plasma sheath.

REFERENCES:
patent: 2845539 (1958-07-01), Robinson
patent: 3355615 (1967-11-01), Bihan
patent: 3585397 (1971-06-01), Brewer

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