Method and apparatus for energy beam machining

Details Method and apparatus for energy beam machining Method and apparatus for energy beam machining

1995-09-21

1998-06-23

Vargot, Mathieu D.

Plastic and nonmetallic article shaping or treating: processes

Optical article shaping or treating

Nonresinous material only

65 61, 65102, 2191216, 264 137, 264 27, 264 401, 264101, 425135, 425173, 4251744, B29C 5916

Patent

active

057701237

ABSTRACT:
An energy beam is irradiated to a workpiece through a beam transmission hole defined in a mask. At that time, a relative position between an energy beam source and the mask or the mask and the workpiece is changed, so that machining depth of the workpiece is varied depending on machining portions of the workpiece, which correspond to amounts of irradiation of the energy beam. With this method, a machined product having locally different depths very easily can be made and further the product can be machined to desired depths with high accuracy by a single machining operation in a short time.

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Fusao Shimokawa et al., Reactive-fast-atom Beam Etching of GaAs Using CI.sub.2 Gas, Journal of Applied Physics, Sep. 15, 1989, pp. 2613-2618.
Actual State of Integrated Circuit Technique with English translation.
The 71st JSME Spring Annual Meeting, No. 940-10, Mar. 29, 1994 with English translation.

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