Method and apparatus for dry processing of substrates

Details Method and apparatus for dry processing of substrates Method and apparatus for dry processing of substrates

1986-10-10

1987-08-25

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156655, 1566591, 156668, 156345, 20419232, 204298, B44C 122, B29C 3700, C03C 1500, C03C 2506

Patent

active

046891129

ABSTRACT:
This invention relates to an apparatus and process for the uniform dry process treatment of the surface of a substrate. More particularly, the invention relates to an apparatus and process wherein a gas plasma composition having at least one reactive specie is supplied through a first inlet port into a chamber means containing the substrate to be treated. A second gas is also supplied into the chamber through a second inlet port thereby redirecting the gas plasma composition into contact with the substrate in a substantially uniform manner.

REFERENCES:
patent: 4579623 (1986-04-01), Suzuki et al.
patent: 4595452 (1986-06-01), Landau et al.
patent: 4612085 (1986-09-01), Jelks et al.
patent: 4615756 (1986-10-01), Tsujii et al.

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