Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1985-10-28
1987-09-15
Rosenberger, R. A.
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356237, 356378, G05B 100
Patent
active
046936084
ABSTRACT:
A method for determining positions of points on a surface of an article including the steps of: detecting apparent positional information of the points from an image of the arrangement of the points; detecting a relative difference between the apparent positional information and predetermined positional information according to design data of the arrangement of the points; and modifying the apparent positional information by the relative difference, which modified information is transmitted to a subsequent system for positioning the point in place. By this, it is possible to inspect a plurality of apertures arranged with a predetermined relationship to each other, such as holes on a nozzle plate of a spinneret, in which apertures are sequentially positioned under a microscope according to positional signals generated based on the positional information obtained.
REFERENCES:
patent: 3806252 (1974-04-01), Harris et al.
patent: 3873211 (1975-03-01), Watson
Tsujiyama et al, "An Automated Mask Defect Inspection System", Review of the Electrical Communication Laboratories, vol. 30, No. 6 (1982) pp. 1076-1085.
West et al, "Computer-Controlled Optical Testing of High Density Printed Circuit Boards", IBM Journal of Research and Development, vol. 27, No. 1 (Jan. 1983) pp. 50-58.
Kitagawa Katsuichi
Tamura Kouichi
Rosenberger R. A.
Toray Industries Inc.
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