Method and apparatus for detecting surface flaws

Details Method and apparatus for detecting surface flaws Method and apparatus for detecting surface flaws

1995-10-27

1998-11-10

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356237, G01J 404

Patent

active

058352201

ABSTRACT:
A method for detecting a surface flaw which includes the steps of (i) irradiating polarized light to a surface of a sample to be inspected and determining ellipso-parameters (.PSI., .DELTA.) of reflected light from the surface of the sample; (ii) irradiating light to a same position as irradiated by the polarized light and determining the intensity (I) of reflected light from the surface of the sample; and (iii) determining a type and grade of a flaw on the surface of the sample based on the ellipso-parameters (.PSI.,.DELTA.) and the reflected light intensity (I). A surface flaw detecting apparatus includes (i) a first measuring device for irradiating polarized light to a surface to be inspected and measuring ellipso-parameters (.PSI.,.DELTA.) of reflected light from the surface; (ii) a second measuring device for irradiating light to a same position as irradiated by the polarized light and measuring the intensity (I) of reflected light from that position; and (iii) an output device for outputting a three-dimensional coordinate position of .PSI., .DELTA., I representing the reflected light from the surface, while sorting the position into a preset zone.

REFERENCES:
patent: 4482250 (1984-11-01), Hirvonen et al.
patent: 4516855 (1985-05-01), Korth
patent: 4655595 (1987-04-01), Bjork et al.
patent: 4740079 (1988-04-01), Koizumi et al.
patent: 5438415 (1995-08-01), Kazama

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