Electric lamp and discharge devices – Electrode and shield structures – Tubular or hollow sleeve
Reexamination Certificate
2005-05-03
2005-05-03
Patel, Nimeshkumar D. (Department: 2879)
Electric lamp and discharge devices
Electrode and shield structures
Tubular or hollow sleeve
C313S618000, C313S631000, C313S632000, C313S634000, C250S50400H, C250S493100, C378S119000
Reexamination Certificate
active
06888297
ABSTRACT:
Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
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patent: 6153044 (2000-11-01), Klebanoff et al.
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patent: 6452199 (2002-09-01), Partlo et al.
patent: 20040099820 (2004-05-01), Bristol
Klebanoff Leonard E.
Rader Daniel J.
Silfvast William T.
EUV LLC
Nissen Donald A.
Patel Nimeshkumar D.
Roy Sikha
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