4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Leonard E. Klebanoff

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Apparatus and method for in-situ cleaning of resist...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Apparatus for in situ cleaning of carbon contaminated surfaces

Cleaning and liquid contact with solids – Semiconductor wafer
Reexamination Certificate

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Extreme-UV lithography vacuum chamber zone seal

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Extreme-UV lithography vacuum chamber zone seal

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Extreme-UV lithography vacuum chamber zone seal

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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