Method and apparatus for crystal analysis

Details Method and apparatus for crystal analysis Method and apparatus for crystal analysis

2006-08-15

2006-08-15

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S306000, C250S307000, C250S492300, C250S491100, C250S492100, C250S492200, C250S492210

Reexamination Certificate

active

07091484

ABSTRACT:
The method of measuring crystallographic orientations, crystal systems or the like of the surface of a specimen has steps of: irradiating the specimen with an ion beam; measuring the secondary electrons generated by the irradiation of the ion beam; repeating the irradiation of the ion beam and the measurement of the secondary electrons with each variation in an angle of incidence of the ion beam with respect to the specimen; and determining the crystalline state based on the variation in the amount of the secondary electrons corresponding to the variation of the angle of incidence.

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