Method and apparatus for cooling wafers

Details Method and apparatus for cooling wafers Method and apparatus for cooling wafers

1991-05-15

1993-04-06

Flanigan, Allen J.

Heat exchange

Regenerator

Checker brick structure

165 801, 269903, 118728, B25B 1100, F28F 700

Patent

active

051994836

ABSTRACT:
A wafer cooling apparatus characterized by a chamber, a pedestal disposed within the chamber and a mechanism for lowering a semiconductor wafer onto an upper surface of the pedestal. The upper surface of the pedestal is grooved to allow gas trapped between the wafer and the pedestal surface to escape around the periphery of the wafer, thereby minimizing the tendency of the wafer to "skate" across the surface of the pedestal on a thin layer of gas. The method involves extending a number of pins through a grooved cooling surface of the pedestal to contact a wafer, and retracting the pins into the pedestal to lower the wafer to the cooling surface and to force gas trapped between the wafer and the pedestal into the grooves of the pedestal.

REFERENCES:
patent: 4433835 (1984-02-01), Wheeler
patent: 4724621 (1988-02-01), Hobson et al.
patent: 4842683 (1989-06-01), Cheng et al.

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