4. Heat exchange
  5. Regenerator
  6. Checker brick structure

Kenneth J. Bahng

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Apparatus for controlling leading edge and trailing edge...

Abrading – Machine – Endless band tool
Reexamination Certificate

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Integrated method for removal of halogen residues from...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method and apparatus for cooling wafers

Heat exchange – Regenerator – Checker brick structure
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Substrate temperature measurement by infrared transmission

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Profile ID: LFUS-PAI-P-759554

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