Method and apparatus for cooling a vacuum device

Details Method and apparatus for cooling a vacuum device Method and apparatus for cooling a vacuum device

1994-06-27

1996-08-27

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D 800

Patent

active

055489648

ABSTRACT:
A cooling structure for a vacuum device includes an external frame portion positioned between vacuum chamber flange and cryopump flange; a cooling panel formed in a partition surrounded by said external frame, the cooling panel having an opening that allows a fluid flow between said vacuum chamber and said cryopump; a cooling means positioned in contact with an exposed peripheral cooling panel surface for cooling said cooling panel; and a coolant feeding means for supplying coolant to the cooling means.

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patent: 5357760 (1994-10-01), Higham

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