Method and apparatus for controlling the spatial temperature...

Details Method and apparatus for controlling the spatial temperature... Method and apparatus for controlling the spatial temperature...

2005-01-25

2005-01-25

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S544000

Reexamination Certificate

active

06847014

ABSTRACT:
A chuck for a plasma processor comprises a temperature-controlled base, a thermal insulator, a flat support, and a heater. The temperature-controlled base has a temperature below the desired temperature of a workpiece. The thermal insulator is disposed over the temperature-controlled base. The flat support holds a workpiece and is disposed over the thermal insulator. A heater is embedded within the flat support and/or disposed on an underside of the flat support. The heater includes a plurality of heating elements that heat a plurality of corresponding heating zones. The power supplied and/or temperature of each heating element is controlled independently.

REFERENCES:
patent: 4518848 (1985-05-01), Weber
patent: 5059770 (1991-10-01), Mahawili
patent: 5294778 (1994-03-01), Carman et al.
patent: 5413360 (1995-05-01), Atari et al.
patent: 5539179 (1996-07-01), Nozawa et al.
patent: 5851641 (1998-12-01), Matsunaga et al.
patent: 5854468 (1998-12-01), Muka
patent: 5925227 (1999-07-01), Kobayashi et al.
patent: 6051303 (2000-04-01), Katsuda et al.
patent: 6080969 (2000-06-01), Goto et al.
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6259592 (2001-07-01), Ono
patent: 6310755 (2001-10-01), Kholodenko et al.
patent: 6365879 (2002-04-01), Kuibira et al.
patent: 6379222 (2002-04-01), Wise et al.

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