Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-11-28
1986-01-21
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156626, 156646, 156345, 204192E, 204298, B44C 122, C03C 1500, C03C 2506, C23F 102
Patent
active
045656010
ABSTRACT:
This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.
REFERENCES:
patent: 4313783 (1982-02-01), Davies et al.
patent: 4384918 (1983-05-01), Abe
patent: 4399016 (1983-08-01), Tsukada et al.
Fukushima Yoshimasa
Hiratsuka Kousai
Kakehi Yutaka
Nakazato Norio
Shibata Fumio
Hitachi , Ltd.
Powell William A.
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