Method and apparatus for controlling sample temperature

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

156626, 156646, 156345, 204192E, 204298, B44C 122, C03C 1500, C03C 2506, C23F 102

Patent

active

045656010

ABSTRACT:
This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.

REFERENCES:
patent: 4313783 (1982-02-01), Davies et al.
patent: 4384918 (1983-05-01), Abe
patent: 4399016 (1983-08-01), Tsukada et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method and apparatus for controlling sample temperature does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for controlling sample temperature, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for controlling sample temperature will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2297072

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.