Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-09
2010-06-15
Rodriguez, Paul L (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S028000
Reexamination Certificate
active
07738986
ABSTRACT:
A method includes acquiring metrology data associated with a process. Bias information associated with the process is determined. The metrology data is adjusted based on the bias information to generate bias-adjusted metrology data. The bias-adjusted metrology data is filtered to identify and reject outlier data. The process is controlled based on the metrology data remaining after the rejection of the outlier data.
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Office Action dated Sep. 17, 2008 from related U.S. Appl. No. 11/420,625.
Good Richard P.
Lensing Kevin R.
Stirton James Broc
GlobalFoundries Inc.
Rao Sheela
Rodriguez Paul L
Williams Morgan & Amerson P.C.
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