4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

James Broc Stirton

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Method and apparatus for compensating metrology data for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for controlling a polishing process...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and apparatus for controlling photolithography...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Method and apparatus for determining feature characteristics...

Optics: measuring and testing – Dimension – Thickness
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Method and apparatus for generating a polishing process...

Optics: measuring and testing – Shape or surface configuration
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Profile ID: LFUS-PAI-P-2296388

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