Method and apparatus for cleaning a throttle valve

Details Method and apparatus for cleaning a throttle valve Method and apparatus for cleaning a throttle valve

1995-05-25

1998-01-13

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

118 50, 118 501, 20429807, 20429833, C23C 1600

Patent

active

057074518

ABSTRACT:
An improved method of in-situ cleaning a throttle valve in a CVD device and exhaust flow control apparatus for facilitating such cleaning. The throttle valve is repositioned such that it is juxtaposed in close proximity to the exhaust gas port of the reaction chamber. A plasma is then ignited in a cleaning gas mixture of nitrogen trifluoride, hexafluoroethane and oxygen.

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"Throttle Valve for Vacuum System", May, 1968, IBM Technical Disclosure Bulletin, vol. 10, No. 12, 1988.

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