Method and apparatus for cleaning a thin disk

Details Method and apparatus for cleaning a thin disk Method and apparatus for cleaning a thin disk

2000-10-26

2003-05-06

Gulakowski, Randy (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S103200, C134S06400P, C134S102200, C134S153000, C134S001300, C134S003000, C310S334000

Reexamination Certificate

active

06557564

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates generally to apparatus and methods for cleaning thin disks, such as semiconductor wafers, compact disks, glass wafers and the like.
BACKGROUND OF THE INVENTION
A conventional method for cleaning particles from semiconductor wafers is known as megasonic cleaning. During megasonic cleaning, a transducer oscillates between compressed and strained states at a near 1 MHz rate. The transducer is coupled to a fluid, either fluid in a fluid filled tank, or fluid flowing through a nozzle. The megasonic oscillation output by the transducer is thereby coupled to the fluid, causing a megasonic pressure oscillation therein. As the pressure in the fluid oscillates between positive and negative, cavitation or bubbles form in the liquid during negative pressure and collapse or shrink during positive pressure. This bubble oscillation gently cleans the surface of the wafer.
To cause the transducer to oscillate, a power supply is coupled to the transducer and is adapted to deliver energy thereto. However, due to an impedance mismatch a portion of the power supplied to the transducer typically is reflected from the transducer rather than being delivered thereto. Thus, efficiency of cleaning within the tank is reduced. Conventional megasonic cleaning apparatus provide a matching network that attempts to minimize the power reflected from a transducer, but that gleans no other information from the reflected power.
SUMMARY OF THE INVENTION
The invention provides a megasonic tank system having a controller that may monitor power signals reflected from a transducer (“reflected power signals”) and that may determine cleaning information based on the reflected power signals. The megasonic tank system also comprises a tank adapted to contain a fluid, a transducer coupled to the tank so as to transmit energy to the fluid, and a power supply coupled to the transducer and adapted to deliver energy thereto.
Other features and aspects of the present invention will become more fully apparent from the following detailed description of the preferred embodiments, the appended claims and the accompanying drawings.


REFERENCES:
patent: 3601717 (1971-08-01), Kuecken
patent: 3870957 (1975-03-01), Straw
patent: 4466288 (1984-08-01), Grynberg et al.
patent: 4647871 (1987-03-01), Turner, Jr.
patent: 5496411 (1996-03-01), Candy
patent: 5625249 (1997-04-01), Grant
patent: 6047246 (2000-04-01), Vickers et al.
patent: 6104287 (2000-08-01), Meyer

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