Method and apparatus for classifying repetitive defects on a...

Details Method and apparatus for classifying repetitive defects on a... Method and apparatus for classifying repetitive defects on a...

2005-07-13

2008-03-04

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237200, C382S144000, C382S152000

Reexamination Certificate

active

07339663

ABSTRACT:
A method and apparatus of classifying repetitive defects on a substrate is provided. Defects of dies on the substrate are sequentially compared with a predetermined reference die. Sets of coordinates are marked on the reference die which are corresponding to the position of the defects on the dies on the substrate. Then, repetitive defects are classified which are repeatedly marked in a specified region on the reference die.

REFERENCES:
patent: 6466895 (2002-10-01), Harvey et al.
patent: 6876445 (2005-04-01), Shibuya et al.
patent: 6975754 (2005-12-01), Hiroi et al.
patent: 2004-117229 (2004-04-01), None
patent: 1999-49102 (1999-07-01), None
patent: 10-0286098 (2001-01-01), None
English language abstract of the Korean Publication No. 1999-49102.
English language abstract of the Korean Publication No. 10-0286098, Oct. 1, 2001.
English language abstract of the Korean Publication No. 2004-117229.

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